JPH0612544Y2 - プローブカード - Google Patents
プローブカードInfo
- Publication number
- JPH0612544Y2 JPH0612544Y2 JP14118089U JP14118089U JPH0612544Y2 JP H0612544 Y2 JPH0612544 Y2 JP H0612544Y2 JP 14118089 U JP14118089 U JP 14118089U JP 14118089 U JP14118089 U JP 14118089U JP H0612544 Y2 JPH0612544 Y2 JP H0612544Y2
- Authority
- JP
- Japan
- Prior art keywords
- insulating resin
- probe
- probe card
- chip
- bump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title claims description 42
- 229920005989 resin Polymers 0.000 claims description 26
- 239000011347 resin Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14118089U JPH0612544Y2 (ja) | 1989-12-06 | 1989-12-06 | プローブカード |
US07/548,401 US5055778A (en) | 1989-10-02 | 1990-07-05 | Probe card in which contact pressure and relative position of each probe end are correctly maintained |
US07/735,214 US5134365A (en) | 1989-07-11 | 1991-07-24 | Probe card in which contact pressure and relative position of each probe end are correctly maintained |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14118089U JPH0612544Y2 (ja) | 1989-12-06 | 1989-12-06 | プローブカード |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0380373U JPH0380373U (en]) | 1991-08-16 |
JPH0612544Y2 true JPH0612544Y2 (ja) | 1994-03-30 |
Family
ID=31688101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14118089U Expired - Lifetime JPH0612544Y2 (ja) | 1989-07-11 | 1989-12-06 | プローブカード |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0612544Y2 (en]) |
-
1989
- 1989-12-06 JP JP14118089U patent/JPH0612544Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0380373U (en]) | 1991-08-16 |
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